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Analysis of Resolution and Sensitivity of Kelvin Probe Force Microscopy

Mao, Bin (2012) Analysis of Resolution and Sensitivity of Kelvin Probe Force Microscopy. Master's Thesis, University of Pittsburgh. (Unpublished)

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Kelvin probe force microscope (KPFM) has evolved into an effective tool to characterize electronic properties of materials and devices. However, there is lack of systematic analysis of its practical aspects such as resolution and sensitivity.

By analyzing the electrostatic model of the tip and sample, we can show that KPFM images are two-dimensional convolution of the actual surface potential distribution with a point spread function (PSF) derived from the tip geometry. Point spread function is a powerful tool, which can help us analyze the resolution. This thesis presents an analytical approach to find PSFs for probes with different geometric shapes in both amplitude-modulation and frequency-modulation KPFM.

Based on PSF, we can define the resolution of KPFM according to Raleigh criteria. With this definition, we analyze the resolution of KPFM image corresponding to different shapes and positions of tips. This method leads us to find an optimal shape of tip to obtain good resolution in KPFM. Also, the resolution of single-pass scan KPFM and dual-pass lift-up scan KPFM is compared. In addition, we investigate the sensitivity of KPFM under different operation modes with various scanning parameters. The findings in this research provide practical guidance for setting proper parameters in KPFM.


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Item Type: University of Pittsburgh ETD
Status: Unpublished
CreatorsEmailPitt UsernameORCID
Mao, Binbim3@pitt.eduBIM3
ETD Committee:
TitleMemberEmail AddressPitt UsernameORCID
Thesis AdvisorLi, Guangyonggul6@pitt.eduGUL6
Committee MemberKim, Hong Koohkk@pitt.eduHKK
Committee MemberMao, Zhihongzhm4@pitt.eduZHM4
Date: 4 June 2012
Date Type: Publication
Defense Date: 3 April 2012
Approval Date: 4 June 2012
Submission Date: 3 April 2012
Access Restriction: 5 year -- Restrict access to University of Pittsburgh for a period of 5 years.
Number of Pages: 60
Institution: University of Pittsburgh
Schools and Programs: Swanson School of Engineering > Electrical Engineering
Degree: MSEE - Master of Science in Electrical Engineering
Thesis Type: Master's Thesis
Refereed: Yes
Uncontrolled Keywords: KPFM, Resolution, Sensitivity, Point spread function, Electrostatic force model
Date Deposited: 04 Jun 2012 17:26
Last Modified: 04 Jun 2017 05:15


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