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Wear-resistant nanoscale silicon carbide tips for scanning probe applications

Lantz, MA and Gotsmann, B and Jaroenapibal, P and Jacobs, TDB and O'Connor, SD and Sridharan, K and Carpick, RW (2012) Wear-resistant nanoscale silicon carbide tips for scanning probe applications. Advanced Functional Materials, 22 (8). 1639 - 1645. ISSN 1616-301X

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Abstract

The search for hard materials to extend the working life of sharp tools is an age-old problem. In recent history, sharp tools must also often withstand high temperatures and harsh chemical environments. Nanotechnology extends this quest to tools such as scanning probe tips that must be sharp on the nanoscale, but still very physically robust. Unfortunately, this combination is inherently contradictory, as mechanically strong, chemically inert materials tend to be difficult to fabricate with nanoscale fidelity. Here a novel process is described, whereby the surfaces of pre-existing, nanoscale Si tips are exposed to carbon ions and then annealed, to form a strong silicon carbide (SiC) layer. The nanoscale sharpness is largely preserved and the tips exhibit a wear resistance that is orders of magnitude greater than that of conventional silicon tips and at least 100-fold higher than that of monolithic, SiO-doped diamond-like-carbon (DLC) tips. The wear is well-described by an atom-by-atom wear model, from which kinetic parameters are extracted that enable the prediction of the long-time scale reliability of the tips. © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.


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Details

Item Type: Article
Status: Published
Creators/Authors:
CreatorsEmailPitt UsernameORCID
Lantz, MA
Gotsmann, B
Jaroenapibal, P
Jacobs, TDBtjacobs@pitt.eduTJACOBS0000-0001-8576-914X
O'Connor, SD
Sridharan, K
Carpick, RW
Date: 24 April 2012
Date Type: Publication
Access Restriction: No restriction; Release the ETD for access worldwide immediately.
Journal or Publication Title: Advanced Functional Materials
Volume: 22
Number: 8
Page Range: 1639 - 1645
DOI or Unique Handle: 10.1002/adfm.201102383
Institution: University of Pittsburgh
Schools and Programs: Swanson School of Engineering > Mechanical Engineering and Materials Science
Refereed: Yes
ISSN: 1616-301X
Related URLs:
Date Deposited: 10 Oct 2014 15:14
Last Modified: 02 Feb 2019 15:55
URI: http://d-scholarship.pitt.edu/id/eprint/23178

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