Fletcher, PC and Felts, JR and Dai, Z and Jacobs, TD and Zeng, H and Lee, W and Sheehan, PE and Carlisle, JA and Carpick, RW and King, WP
(2010)
Wear-resistant diamond nanoprobe tips with integrated silicon heater for tip-based nanomanufacturing.
ACS Nano, 4 (6).
3338 - 3344.
ISSN 1936-0851
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Abstract
We report exceptional nanoscale wear and fouling resistance of ultrananocrystalline diamond (UNCD) tips integrated with doped silicon atomic force microscope (AFM) cantilevers. The resistively heated probe can reach temperatures above 600°C. The batch fabrication process produces UNCD tips with radii as small as 15 nm, with average radius 50 nm across the entire wafer. Wear tests were performed on substrates of quartz, silicon carbide, silicon, or UNCD. Tips were scanned for more than 1 m at a scan speed of 25 μm s -1 at temperatures ranging from 25 to 400°C under loads up to 200 nN. Under these conditions, silicon tips are partially or completely destroyed, while the UNCD tips exhibit little or no wear, no signs of delamination, and exceptional fouling resistance. We demonstrate nanomanufacturing of more than 5000 polymer nanostructures with no deterioration in the tip. © 2010 American Chemical Society.
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Details
Item Type: |
Article
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Status: |
Published |
Creators/Authors: |
Creators | Email | Pitt Username | ORCID  |
---|
Fletcher, PC | | | | Felts, JR | | | | Dai, Z | | | | Jacobs, TD | tjacobs@pitt.edu | TJACOBS | 0000-0001-8576-914X | Zeng, H | | | | Lee, W | | | | Sheehan, PE | | | | Carlisle, JA | | | | Carpick, RW | | | | King, WP | | | |
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Date: |
22 June 2010 |
Date Type: |
Publication |
Journal or Publication Title: |
ACS Nano |
Volume: |
4 |
Number: |
6 |
Page Range: |
3338 - 3344 |
DOI or Unique Handle: |
10.1021/nn100203d |
Schools and Programs: |
Swanson School of Engineering > Mechanical Engineering and Materials Science |
Refereed: |
Yes |
ISSN: |
1936-0851 |
Related URLs: |
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PubMed ID: |
20481445 |
Date Deposited: |
10 Oct 2014 20:16 |
Last Modified: |
22 Jun 2021 12:55 |
URI: |
http://d-scholarship.pitt.edu/id/eprint/23219 |
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