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Wear-resistant diamond nanoprobe tips with integrated silicon heater for tip-based nanomanufacturing

Fletcher, PC and Felts, JR and Dai, Z and Jacobs, TD and Zeng, H and Lee, W and Sheehan, PE and Carlisle, JA and Carpick, RW and King, WP (2010) Wear-resistant diamond nanoprobe tips with integrated silicon heater for tip-based nanomanufacturing. ACS Nano, 4 (6). 3338 - 3344. ISSN 1936-0851

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Abstract

We report exceptional nanoscale wear and fouling resistance of ultrananocrystalline diamond (UNCD) tips integrated with doped silicon atomic force microscope (AFM) cantilevers. The resistively heated probe can reach temperatures above 600°C. The batch fabrication process produces UNCD tips with radii as small as 15 nm, with average radius 50 nm across the entire wafer. Wear tests were performed on substrates of quartz, silicon carbide, silicon, or UNCD. Tips were scanned for more than 1 m at a scan speed of 25 μm s -1 at temperatures ranging from 25 to 400°C under loads up to 200 nN. Under these conditions, silicon tips are partially or completely destroyed, while the UNCD tips exhibit little or no wear, no signs of delamination, and exceptional fouling resistance. We demonstrate nanomanufacturing of more than 5000 polymer nanostructures with no deterioration in the tip. © 2010 American Chemical Society.

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Details

Item Type: Article
Status: Published
Creators/Authors:
CreatorsEmailPitt UsernameORCID
Fletcher, PC
Felts, JR
Dai, Z
Jacobs, TDtjacobs@pitt.eduTJACOBS0000-0001-8576-914X
Zeng, H
Lee, W
Sheehan, PE
Carlisle, JA
Carpick, RW
King, WP
Date: 22 June 2010
Date Type: Publication
Journal or Publication Title: ACS Nano
Volume: 4
Number: 6
Page Range: 3338 - 3344
DOI or Unique Handle: 10.1021/nn100203d
Schools and Programs: Swanson School of Engineering > Mechanical Engineering and Materials Science
Refereed: Yes
ISSN: 1936-0851
Related URLs:
PubMed ID: 20481445
Date Deposited: 10 Oct 2014 20:16
Last Modified: 22 Jun 2021 12:55
URI: http://d-scholarship.pitt.edu/id/eprint/23219

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