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Ion irradiation effects on surface mechanical behavior and shrinkage of hybrid sol-gel derived silicate thin films

Ghisleni, R and Lucca, DA and Wang, YQ and Lee, JK and Nastasi, M and Dong, J and Mehner, A (2008) Ion irradiation effects on surface mechanical behavior and shrinkage of hybrid sol-gel derived silicate thin films. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 266 (10). 2453 - 2456. ISSN 0168-583X

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Abstract

A study of the effects of ion irradiation on the surface mechanical behavior and shrinkage of organic/inorganic modified silicate thin films was performed. The films were synthesized by sol-gel processing from tetraethylorthosilicate (TEOS) and methyltriethoxysilane (MTES) precursors and spin-coated onto Si substrates. The sol viscosity and the spin velocity were adjusted so that the films produced had a final thickness ranging from 580 to 710 nm after heat treatment. The ion species and incident energies used were selected such that the projected ion range was greater than the film thickness, resulting in fully irradiated films. After heat treatment at 300 °C for 10 min, the films were irradiated with 125 keV H+, 250 keV N2+ and 2 MeV Cu+ ions with fluences ranging from 1 × 1014 to 1 × 1016 ions/cm2. Both hardness and reduced elastic modulus were seen to exhibit a monotonic increase with fluence for all three ion species. Also, H loss was found to increase monotonically with increase in fluence, while the film thickness was found to decrease with increase in fluence. © 2008 Elsevier B.V.


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Details

Item Type: Article
Status: Published
Creators/Authors:
CreatorsEmailPitt UsernameORCID
Ghisleni, R
Lucca, DA
Wang, YQ
Lee, JKjul37@pitt.eduJUL370000-0002-7778-7679
Nastasi, M
Dong, J
Mehner, A
Centers: Other Centers, Institutes, or Units > Petersen Institute of NanoScience and Engineering
Date: 1 May 2008
Date Type: Publication
Journal or Publication Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume: 266
Number: 10
Page Range: 2453 - 2456
DOI or Unique Handle: 10.1016/j.nimb.2008.03.020
Schools and Programs: Swanson School of Engineering > Mechanical Engineering and Materials Science
Refereed: Yes
ISSN: 0168-583X
Date Deposited: 30 Oct 2014 14:32
Last Modified: 05 Feb 2019 19:55
URI: http://d-scholarship.pitt.edu/id/eprint/23440

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