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Effects of ion irradiation on the structural transformation of sol-gel derived TEOS/MTES thin films

Lucca, DA and Ghisleni, R and Lee, JK and Wang, YQ and Nastasi, M and Dong, J and Mehner, A (2008) Effects of ion irradiation on the structural transformation of sol-gel derived TEOS/MTES thin films. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 266 (10). 2457 - 2460. ISSN 0168-583X

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Abstract

Ion beam processing of organic/inorganic thin films has been shown to be an effective means in converting polymeric films into their final ceramic-like state. In this study, hybrid sol-gel derived thin films based on TEOS (tetraethylorthosilicate) Si(OC2H5)4 and MTES (methyltriethoxysilane) CH3Si(OC2H5)3 were prepared and deposited on Si substrates by spin coating. After the films were allowed to air dry, they were heat treated at 300 °C for 10 min. Ion irradiation was performed at room temperature using 125 keV H+ and 250 keV N2+ ions with fluences ranging from 1 × 1014 to 5 × 1016 ions/cm2. FT-IR and Raman spectroscopies were used to quantify the chemical structural transformations which occurred including the evolution of the organic components, the cross-linking of silica clusters, and the clustering of carbon. © 2008 Elsevier B.V.


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Details

Item Type: Article
Status: Published
Creators/Authors:
CreatorsEmailPitt UsernameORCID
Lucca, DA
Ghisleni, R
Lee, JKjul37@pitt.eduJUL370000-0002-7778-7679
Wang, YQ
Nastasi, M
Dong, J
Mehner, A
Centers: Other Centers, Institutes, or Units > Petersen Institute of NanoScience and Engineering
Date: 1 May 2008
Date Type: Publication
Journal or Publication Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume: 266
Number: 10
Page Range: 2457 - 2460
DOI or Unique Handle: 10.1016/j.nimb.2008.03.022
Schools and Programs: Swanson School of Engineering > Mechanical Engineering and Materials Science
Refereed: Yes
ISSN: 0168-583X
Date Deposited: 17 Nov 2014 19:26
Last Modified: 05 Feb 2019 19:55
URI: http://d-scholarship.pitt.edu/id/eprint/23490

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