Effect of grain alignment on interface trap density of thermally oxidized aligned-crystalline silicon films

Choi, W and Lee, JK and Findikoglu, AT (2006) Effect of grain alignment on interface trap density of thermally oxidized aligned-crystalline silicon films. Applied Physics Letters, 89 (26). ISSN 0003-6951

Preview	PDF Published Version Available under License : See the attached license file. Download (392kB) | Preview
	Plain Text (licence) Available under License : See the attached license file. Download (1kB)

Abstract

The authors report studies of the effect of grain alignment on interface trap density of thermally oxidized aligned-crystalline silicon (ACSi) films by means of capacitance-voltage (C-V) measurements. C-V curves were measured on metal-oxide-semiconductor (MOS) capacitors fabricated on 〈001〉- oriented ACSi films on polycrystalline substrates. From high-frequency C-V curves, the authors calculated a decrease of interface trap density from 2× 1012 to 1× 1011 cm-2 eV-1 as the grain mosaic spread in ACSi films improved from 13.7° to 6.5°. These results demonstrate the effectiveness of grain alignment as a process technique to achieve significantly enhanced performance in small-grained (≤1 μm) polycrystalline Si MOS-type devices. © 2006 American Institute of Physics.

---

Share

Citation/Export:	Select format... Citation - Text Citation - HTML Endnote BibTex Dublin Core OpenURL MARC (ISO 2709) METS MODS EP3 XML Reference Manager Refer
Social Networking:	Share |

---

Details

Item Type:	Article
Status:	Published
Creators/Authors:	Creators Email Pitt Username ORCID Choi, W Lee, JK jul37@pitt.edu JUL37 0000-0002-7778-7679 Findikoglu, AT
Centers:	Other Centers, Institutes, Offices, or Units > Petersen Institute of NanoScience and Engineering
Date:	1 December 2006
Date Type:	Publication
Journal or Publication Title:	Applied Physics Letters
Volume:	89
Number:	26
DOI or Unique Handle:	10.1063/1.2424655
Schools and Programs:	Swanson School of Engineering > Mechanical Engineering and Materials Science
Refereed:	Yes
ISSN:	0003-6951
Date Deposited:	17 Nov 2014 19:25
Last Modified:	22 Jan 2019 19:55
URI:	http://d-scholarship.pitt.edu/id/eprint/23491

---

Metrics

Monthly Views for the past 3 years

Plum Analytics

Altmetric.com

---

Actions (login required)

View Item