Shao, L and Lee, JK and Wang, YQ and Nastasi, M and Thompson, PE and Theodore, ND and Alford, TL and Mayer, JW and Chen, P and Lau, SS
(2006)
Effect of substrate growth temperatures on H diffusion in hydrogenated Si/Si homoepitaxial structures grown by molecular beam epitaxy.
Journal of Applied Physics, 99 (12).
ISSN 0021-8979
Abstract
We have investigated hydrogen diffusion in hydrogenated 〈100〉 Si/Si homoepitaxial structures, which were grown by molecular beam epitaxy at various temperatures. The substrate growth temperature can significantly affect the H diffusion behavior, with higher growth temperatures resulting in deeper H diffusion. For the Si/Si structure grown at the highest temperature of 800°C, H trapping occurs at the epitaxial Si/Si substrate interface, which results in the formation of (100) oriented microcracks at the interface. The mechanism of H trapping and the potential application of these findings for the development of a method of transferring ultrathin Si layers are discussed. © 2006 American Institute of Physics.
Share
Citation/Export: |
|
Social Networking: |
|
Details
Item Type: |
Article
|
Status: |
Published |
Creators/Authors: |
Creators | Email | Pitt Username | ORCID |
---|
Shao, L | | | | Lee, JK | jul37@pitt.edu | JUL37 | 0000-0002-7778-7679 | Wang, YQ | | | | Nastasi, M | | | | Thompson, PE | | | | Theodore, ND | | | | Alford, TL | | | | Mayer, JW | | | | Chen, P | | | | Lau, SS | | | |
|
Centers: |
Other Centers, Institutes, Offices, or Units > Petersen Institute of NanoScience and Engineering |
Date: |
11 July 2006 |
Date Type: |
Publication |
Journal or Publication Title: |
Journal of Applied Physics |
Volume: |
99 |
Number: |
12 |
DOI or Unique Handle: |
10.1063/1.2204330 |
Schools and Programs: |
Swanson School of Engineering > Mechanical Engineering and Materials Science |
Refereed: |
Yes |
ISSN: |
0021-8979 |
Date Deposited: |
12 Nov 2014 17:28 |
Last Modified: |
05 Feb 2019 19:55 |
URI: |
http://d-scholarship.pitt.edu/id/eprint/23494 |
Metrics
Monthly Views for the past 3 years
Plum Analytics
Altmetric.com
Actions (login required)
|
View Item |