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The Effect of Annealing and Heated Deposition on Alpha and Beta Phase Formation for Tantalum Thin Films

McIntyre, Maxwell (2018) The Effect of Annealing and Heated Deposition on Alpha and Beta Phase Formation for Tantalum Thin Films. Master's Thesis, University of Pittsburgh. (Unpublished)

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Tantalum thin films were deposited via magnetron sputtering. The phase of the deposited thin film was investigated. The tetragonal β-Ta phase possesses different properties when compared with the bcc α-Ta phase. There are applications for both phases but the mechanisms by which phases are formed is still unclear. Three categories of Ta thin film were generated then characterized: as-deposited, annealed, and heated deposition. The thermomechanical properties of Ta thin films were tested by altering deposition and post-deposition conditions and measuring stress evolution. The phase of samples was studied via resistivity measurements and offset/glancing incidence x-ray diffraction. X-ray photoelectron spectroscopy was used for elemental analysis and to confirm film thickness. It is shown that as-deposited conditions lead to β-Ta growth, while annealing to 240 °C causes a β to α-Ta phase transformation. The lower than previously reported phase transformation temperature is shown to be due to that lack of oxygen impurities which form TaO2. Heated deposition at 350 °C consistently generated α-Ta while forming a Ta-Si interface region. XRD and XPS measurements confirm the presence of a TaSi2 layer in annealed and heated deposition samples. These results indicate the importance of the sublayer prior to film deposition in dictating which Ta phase forms.


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Item Type: University of Pittsburgh ETD
Status: Unpublished
CreatorsEmailPitt UsernameORCID
McIntyre, Maxwellmkm93@pitt.edumkm93
ETD Committee:
TitleMemberEmail AddressPitt UsernameORCID
Committee ChairChmielus,
Committee MemberNettleship,
Committee MemberSaidi,
Date: 24 September 2018
Date Type: Publication
Defense Date: 19 July 2018
Approval Date: 24 September 2018
Submission Date: 20 July 2018
Access Restriction: 2 year -- Restrict access to University of Pittsburgh for a period of 2 years.
Number of Pages: 95
Institution: University of Pittsburgh
Schools and Programs: Swanson School of Engineering > Mechanical Engineering and Materials Science
Degree: MS - Master of Science
Thesis Type: Master's Thesis
Refereed: Yes
Uncontrolled Keywords: sputter, phase transformation, x-ray diffraction, x-ray photoelectron spectroscopy
Date Deposited: 24 Sep 2018 13:54
Last Modified: 24 Sep 2020 05:15

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