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Electrically-triggered micro-explosion in a graphene/SiO2/Si structure

Liu, Siyang and Kim, Myungji and Kim, Hong Koo (2018) Electrically-triggered micro-explosion in a graphene/SiO2/Si structure. Scientific Reports, 8 (1). ISSN 2045-2322

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Electrically-triggered micro-explosions in a metal-insulator-semiconductor (MIS) structure can fragment/atomize analytes placed on it, offering an interesting application potential for chip-scale implementation of atomic emission spectroscopy (AES). We have investigated the mechanisms of micro-explosions occurring in a graphene/SiO2/Si (GOS) structure under a high-field pulsed voltage drive. Micro-explosions are found to occur more readily in inversion bias than in accumulation bias. Explosion damages in inversion-biased GOS differ significantly between n-Si and p-Si substrate cases: a highly localized, circular, protruding cone-shape melt of Si for the n-Si GOS case, whereas shallow, irregular, laterally-propagating trenches in SiO2/Si for the p-Si GOS case. These differing damage morphologies are explained by different carrier-multiplication processes: in the n-Si case, impact ionization propagates from SiO2 to Si, causing highly-localized melt explosions of Si in the depletion region, whereas in the p-Si case, from SiO2 towards graphene electrode, resulting in laterally wide-spread micro-explosions. These findings are expected to help optimize the GOS-based atomizer structure for low voltage, small-volume analyte, high sensitivity chip-scale emission spectroscopy.


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Item Type: Article
Status: Published
CreatorsEmailPitt UsernameORCID
Liu, Siyang
Kim, Myungji
Kim, Hong
Date: 9 May 2018
Date Type: Publication
Journal or Publication Title: Scientific Reports
Volume: 8
Number: 1
Publisher: Nature Research (part of Springer Nature)
DOI or Unique Handle: 10.1038/s41598-018-25776-z
Schools and Programs: Swanson School of Engineering > Electrical and Computer Engineering
Refereed: No
ISSN: 2045-2322
Official URL:
Article Type: Research Article
Date Deposited: 19 Jun 2020 13:42
Last Modified: 19 Jun 2020 13:42


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