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Computational Modeling of Rapid Thermal Processing in a Chemical Vapor Deposition Reactor for Catalytic Growth of Carbon Nanotubes

Aurenzi, Julia Amey (2022) Computational Modeling of Rapid Thermal Processing in a Chemical Vapor Deposition Reactor for Catalytic Growth of Carbon Nanotubes. Master's Thesis, University of Pittsburgh. (Unpublished)

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Scalable manufacturing of uniform carbon nanotube (CNT) structures requires careful control of temperature profiles and gas flow rates inside complex chemical reactors. In this work, Ansys® CFX, Release 2021 R2 is used to model the spatiotemporal evolution of temperatures inside a custom-designed multizone chemical vapor deposition (CVD) reactor with rapid thermal processing (RTP) capabilities. Heat is primarily generated by a set of twelve infrared (IR) lamps distributed both above and below the quartz tube in the reaction zones. Radiation is modeled using the Monte Carlo radiation model in Ansys CFX. A catalyst-coated substrate is placed on a silicon wafer held in the middle of the reactor using quartz rods. A thermocouple located beneath the wafer is modeled as a composite, wherein an area-weighted average of all the components was used to determine bulk material properties. A mesh convergence study consisting of three refinements was carried out to ensure proper mesh size. The model is then validated by comparing simulation results to experimental research relating the power supplied to the infrared lamps and the temperature rise dynamics measured by the thermocouple. Results show that the model adequately captures the behavior of the reactor, and can hence be used to accurately explain the influence of different boundary conditions on the spatial distribution of temperatures as well as the rate of heating of both the thermocouple and the catalyst. Accordingly, the model is powerful for the design of new wafer holder geometries and materials to precisely control the temperature distribution around the catalyst in order to achieve geometric and morphological uniformity in as-grown CNT forests.


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Item Type: University of Pittsburgh ETD
Status: Unpublished
CreatorsEmailPitt UsernameORCID
Aurenzi, Julia Ameyjaa156@pitt.edujaa1560000-0001-5728-6984
ETD Committee:
TitleMemberEmail AddressPitt UsernameORCID
Thesis AdvisorBedewy,
Committee MemberLee,
Committee MemberSammak,
Committee MemberSenocak,
Date: 10 June 2022
Date Type: Publication
Defense Date: 21 March 2022
Approval Date: 10 June 2022
Submission Date: 9 April 2022
Access Restriction: 1 year -- Restrict access to University of Pittsburgh for a period of 1 year.
Number of Pages: 78
Institution: University of Pittsburgh
Schools and Programs: Swanson School of Engineering > Mechanical Engineering and Materials Science
Degree: MS - Master of Science
Thesis Type: Master's Thesis
Refereed: Yes
Uncontrolled Keywords: Rapid thermal processing, computational fluid dynamics, Monte Carlo, Ansys CFX, chemical vapor deposition, carbon nanotubes, IR lamps
Date Deposited: 10 Jun 2022 18:57
Last Modified: 10 Jun 2023 05:15


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