Link to the University of Pittsburgh Homepage
Link to the University Library System Homepage Link to the Contact Us Form

Silicon oxidation by atomic and molecular oxygen

Kisa, Maja (2004) Silicon oxidation by atomic and molecular oxygen. Master's Thesis, University of Pittsburgh. (Unpublished)

Primary Text

Download (5MB) | Preview


Atomic oxygen is the most hazardous species of molecules present in the Low Earth Orbit causing failure of the material in space. This study was undertaken to examine the differences in the oxidation of silicon by molecular and atomic oxygen. Hypotheses about the effects of reactive atomic oxygen on the oxidation mechanism of silicon and formed oxide microstructure are presented. The oxides created with atomic and molecular oxygen were studied via Rutherford Backscattering (RBS), High-Resolution Transmission Electron Microscopy (HRTEM), Selected Area Electron Diffraction (SAED), Electron-Energy Loss Spectroscopy (EELS), X-ray Photoelectron Scattering (XPS) and Atomic Force Microscopy (AFM).The results obtained in the experiments are discussed and the possible effects of atomic oxygen on the oxidation mechanism and microstructure formation are inferred. An oxidation model based on thermionic emission is presented as a model for the oxidation by atomic oxygen.


Social Networking:
Share |


Item Type: University of Pittsburgh ETD
Status: Unpublished
CreatorsEmailPitt UsernameORCID
Kisa, Majamar993@pitt.eduMAR993
ETD Committee:
TitleMemberEmail AddressPitt UsernameORCID
Committee ChairYang, Judith C.
Committee MemberBlachere, Jean R.
Committee MemberWiezorek, Jorg M.K.wiezorek@pitt.eduWIEZOREK
Date: 9 June 2004
Date Type: Completion
Defense Date: 3 February 2004
Approval Date: 9 June 2004
Submission Date: 5 February 2004
Access Restriction: No restriction; Release the ETD for access worldwide immediately.
Institution: University of Pittsburgh
Schools and Programs: Swanson School of Engineering > Materials Science and Engineering
Degree: MSMSE - Master of Science in Materials Science and Engineering
Thesis Type: Master's Thesis
Refereed: Yes
Uncontrolled Keywords: 5eV atomic oxygen; AFM; EELS; HRTEM; LEO; RBS; SAED; silicon single-crystal; XPS
Other ID:, etd-02052004-164300
Date Deposited: 10 Nov 2011 19:31
Last Modified: 15 Nov 2016 13:36


Monthly Views for the past 3 years

Plum Analytics

Actions (login required)

View Item View Item