Kisa, Maja
(2004)
Silicon oxidation by atomic and molecular oxygen.
Master's Thesis, University of Pittsburgh.
(Unpublished)
Abstract
Atomic oxygen is the most hazardous species of molecules present in the Low Earth Orbit causing failure of the material in space. This study was undertaken to examine the differences in the oxidation of silicon by molecular and atomic oxygen. Hypotheses about the effects of reactive atomic oxygen on the oxidation mechanism of silicon and formed oxide microstructure are presented. The oxides created with atomic and molecular oxygen were studied via Rutherford Backscattering (RBS), High-Resolution Transmission Electron Microscopy (HRTEM), Selected Area Electron Diffraction (SAED), Electron-Energy Loss Spectroscopy (EELS), X-ray Photoelectron Scattering (XPS) and Atomic Force Microscopy (AFM).The results obtained in the experiments are discussed and the possible effects of atomic oxygen on the oxidation mechanism and microstructure formation are inferred. An oxidation model based on thermionic emission is presented as a model for the oxidation by atomic oxygen.
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Details
| Item Type: |
University of Pittsburgh ETD
|
| Status: |
Unpublished |
| Creators/Authors: |
|
| ETD Committee: |
| Title | Member | Email Address | Pitt Username | ORCID |
|---|
| Committee Chair | Yang, Judith C. | | | | | Committee Member | Blachere, Jean R. | | | | | Committee Member | Wiezorek, Jorg M.K. | wiezorek@pitt.edu | WIEZOREK | |
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| Date: |
9 June 2004 |
| Date Type: |
Completion |
| Defense Date: |
3 February 2004 |
| Approval Date: |
9 June 2004 |
| Submission Date: |
5 February 2004 |
| Access Restriction: |
No restriction; Release the ETD for access worldwide immediately. |
| Institution: |
University of Pittsburgh |
| Schools and Programs: |
Swanson School of Engineering > Materials Science and Engineering |
| Degree: |
MSMSE - Master of Science in Materials Science and Engineering |
| Thesis Type: |
Master's Thesis |
| Refereed: |
Yes |
| Uncontrolled Keywords: |
5eV atomic oxygen; AFM; EELS; HRTEM; LEO; RBS; SAED; silicon single-crystal; XPS |
| Other ID: |
http://etd.library.pitt.edu/ETD/available/etd-02052004-164300/, etd-02052004-164300 |
| Date Deposited: |
10 Nov 2011 19:31 |
| Last Modified: |
15 Nov 2016 13:36 |
| URI: |
http://d-scholarship.pitt.edu/id/eprint/6332 |
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