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Analysis and Fabrication of MEMS Tunable Piezoelectric Resonators

Frederick, Amanda Allison (2006) Analysis and Fabrication of MEMS Tunable Piezoelectric Resonators. Master's Thesis, University of Pittsburgh. (Unpublished)

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Piezoelectric MEMS resonators are being used with increased frequency for many applications, operating as frequency sources in sensors, actuators, clocks and filters. Compensation for the effects of manufacturing variation and a changeable environment, as well as a desire for frequency-hopping capabilities, have brought forth a need for post-process tuning of the resonant frequency of at these devices, in particular clocks and filters manufactured at the MEMS scale. This work applies a shunt capacitor tuning concept to three different types of piezoelectric MEMS resonators: bending beam devices, surface acoustic wave devices, and film bulk acoustic wave devices, in order to solve this tuning need across a wide range of the frequency spectrum (single Kilohertz to tens of Gigahertz). Questions about how the material and design parameters of these resonators affect the resonant frequencies and tunability of the devices are further discussed for each of the designs. In addition to the theoretical modeling, the fabrication steps necessary for processing the piezoelectric MEMS bending devices, specifically utilizing PZT thin films and an interdigitated design, are developed. Results of many fabrication trials are discussed, and finalized process plans for fabricating quality thin film PZT and PZT interdigitated devices are provided.


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Item Type: University of Pittsburgh ETD
Status: Unpublished
CreatorsEmailPitt UsernameORCID
Frederick, Amanda
ETD Committee:
TitleMemberEmail AddressPitt UsernameORCID
Committee ChairClark, William Wbluetick@pitt.eduBLUETICK
Committee MemberVipperman, Jeffery Sjsv@pitt.eduJSV
Committee MemberMarangoni, Roy Dmaran@pitt.eduMARAN
Date: 27 September 2006
Date Type: Completion
Defense Date: 5 May 2006
Approval Date: 27 September 2006
Submission Date: 10 May 2006
Access Restriction: No restriction; Release the ETD for access worldwide immediately.
Institution: University of Pittsburgh
Schools and Programs: Swanson School of Engineering > Mechanical Engineering
Degree: MSME - Master of Science in Mechanical Engineering
Thesis Type: Master's Thesis
Refereed: Yes
Uncontrolled Keywords: bending beam; film bulk acoustic wave; frequency; lead zirconate titanate; MEMS; piezoelectric; pzt; resonators; sol gel; surface acoustic wave; tuning
Other ID:, etd-05102006-165331
Date Deposited: 10 Nov 2011 19:44
Last Modified: 15 Nov 2016 13:43


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