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New Formulation for Finite Element Modeling Electrostatically DrivenMicroelectromechanical Systems

Avdeev, Ilya V (2004) New Formulation for Finite Element Modeling Electrostatically DrivenMicroelectromechanical Systems. Doctoral Dissertation, University of Pittsburgh. (Unpublished)

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The increased complexity and precision requirements of microelectromechanical systems(MEMS) have brought about the need to develop more reliable and accurate MEMS simulation tools. To better capture the physical behavior encountered, several finite elementanalysis techniques for modeling electrostatic and structural coupling in MEMS devices havebeen developed in this project. Using the principle of virtual work and an approximationfor capacitance, a new 2-D lumped transducer element for the static analysis of MEMS hasbeen developed. This new transducer element is compatible to 2-D structural and beamelements. A novel strongly coupled 3-D transducer formulation has also been developed tomodel MEMS devices with dominant fringing electrostatic fields. The transducer is compatible with both structural and electrostatic solid elements, which allows for modeling complexdevices. Through innovative internal morphing capabilities and exact element integrationthe 3-D transducer element is one of the most powerful coupled field FE analysis tools available. To verify the accuracy and effectiveness of both the 2-D and 3-D transducer elements a series of benchmark analyses were conducted. More specifically, the numerically predicted results for the misalignment of lateral combdrive fingers were compared to available analytical and modeling techniques. Electrostatic uncoupled 2-D and 3-D finite element models werealso used to perform energy computations during misalignment. Finally, a stability analysisof misaligned combdrive was performed using a coupled 2-D finite element approach. Theanalytical and numerical results were compared and found to vary due to fringing fields.


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Item Type: University of Pittsburgh ETD
Status: Unpublished
CreatorsEmailPitt UsernameORCID
Avdeev, Ilya Vivast@pitt.eduIVAST
ETD Committee:
TitleMemberEmail AddressPitt UsernameORCID
Committee ChairLovell, Mmlovell@pitt.eduMLOVELL
Committee CoChairOnipede,
Committee MemberOstergaard,
Committee MemberVipperman, Jjsv@pitt.eduJSV
Committee MemberMickle, Mmickle@engr.pitt.eduMICKLE
Committee MemberWang, Q.-Mqmwang@engr.pitt.ed
Date: 2 February 2004
Date Type: Completion
Defense Date: 20 November 2003
Approval Date: 2 February 2004
Submission Date: 24 November 2003
Access Restriction: No restriction; Release the ETD for access worldwide immediately.
Institution: University of Pittsburgh
Schools and Programs: Swanson School of Engineering > Mechanical Engineering
Degree: PhD - Doctor of Philosophy
Thesis Type: Doctoral Dissertation
Refereed: Yes
Uncontrolled Keywords: coupled field; design; FEA; MEMS; transducer
Other ID:, etd-11242003-124652
Date Deposited: 10 Nov 2011 20:06
Last Modified: 19 Dec 2016 14:37


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