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Gujrati, Abhijeet and Khanal, Subarna R. and Jacobs, Tevis D. B. (2017) A Method for Quantitative Real-Time Evaluation of Measurement Reliability When Using Atomic Force Microscopy-Based Metrology. IEEE Nano, 2017 IEEE 17th International Conference on Nanotechnology. pp. 135-138. ISSN 1944-9380

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