Undistorted 3D microstructures in SU8 formed through two-photon polymerization

Ohlinger, K and Lin, Y and Poole, Z and Chen, KP (2011) Undistorted 3D microstructures in SU8 formed through two-photon polymerization. AIP Advances, 1 (3).

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Abstract

This paper presents the wavelength dependence of two-photon polymerization in SU-8 between 720-780 nm. The study is performed by microstructuring SU-8 through a single-shot exposure of SU-8 to 140 fs tunable laser pulses with 80 MHz repetition rate, or by laser direct writing. Two-photon absorption is closely related to one-photon absorption in pristine SU-8. By careful design of the neighboring micro-structures, or by varying wet-processing parameters during development, undistorted and unbended 3D micro-structures have been fabricated through direct laser writing. © 2011 Author(s).

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Details

Item Type:	Article
Status:	Published
Creators/Authors:	Creators Email Pitt Username ORCID Ohlinger, K Lin, Y Poole, Z Chen, KP pec9@pitt.edu PEC9 0000-0002-4830-0817
Date:	1 September 2011
Date Type:	Publication
Journal or Publication Title:	AIP Advances
Volume:	1
Number:	3
DOI or Unique Handle:	10.1063/1.3646148
Schools and Programs:	Swanson School of Engineering > Electrical and Computer Engineering
Refereed:	Yes
Date Deposited:	17 Oct 2014 18:51
Last Modified:	02 Feb 2021 16:55
URI:	http://d-scholarship.pitt.edu/id/eprint/23271

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