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Effects of ion irradiation on the structural transformation of sol-gel derived TEOS/MTES thin films

Lucca, DA and Ghisleni, R and Lee, JK and Wang, YQ and Nastasi, M and Dong, J and Mehner, A (2008) Effects of ion irradiation on the structural transformation of sol-gel derived TEOS/MTES thin films. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 266 (10). 2457 - 2460. ISSN 0168-583X

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Abstract

Ion beam processing of organic/inorganic thin films has been shown to be an effective means in converting polymeric films into their final ceramic-like state. In this study, hybrid sol-gel derived thin films based on TEOS (tetraethylorthosilicate) Si(OC H ) and MTES (methyltriethoxysilane) CH Si(OC H ) were prepared and deposited on Si substrates by spin coating. After the films were allowed to air dry, they were heat treated at 300 °C for 10 min. Ion irradiation was performed at room temperature using 125 keV H and 250 keV N ions with fluences ranging from 1 × 10 to 5 × 10 ions/cm . FT-IR and Raman spectroscopies were used to quantify the chemical structural transformations which occurred including the evolution of the organic components, the cross-linking of silica clusters, and the clustering of carbon. © 2008 Elsevier B.V. 2 5 4 3 2 5 3 + 2+ 14 16 2


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Details

Item Type: Article
Status: Published
Creators/Authors:
CreatorsEmailPitt UsernameORCID
Lucca, DA
Ghisleni, R
Lee, JKjul37@pitt.eduJUL370000-0002-7778-7679
Wang, YQ
Nastasi, M
Dong, J
Mehner, A
Centers: Other Centers, Institutes, Offices, or Units > Petersen Institute of NanoScience and Engineering
Date: 1 May 2008
Date Type: Publication
Journal or Publication Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume: 266
Number: 10
Page Range: 2457 - 2460
DOI or Unique Handle: 10.1016/j.nimb.2008.03.022
Schools and Programs: Swanson School of Engineering > Mechanical Engineering and Materials Science
Refereed: Yes
ISSN: 0168-583X
Date Deposited: 17 Nov 2014 19:26
Last Modified: 30 Mar 2021 20:55
URI: http://d-scholarship.pitt.edu/id/eprint/23490

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