The Analysis and Testing of MEMS and Macro Scale Piezoelectric Devices

Knight, Ryan Robert (2007) The Analysis and Testing of MEMS and Macro Scale Piezoelectric Devices. Master's Thesis, University of Pittsburgh. (Unpublished)

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Abstract

Piezoelectric materials are incorporated into many of today's commercial and research devices. Accelerometers, crystal oscillators, sonar devices, audio transducers, igniters, position systems, and vibration absorbers are to name a few. The applications associated with piezoelectricity can be categorized into three groups: 1) sensors, 2) actuators, and 3) energy harvesters. Clark (2000), Lesieutre (2004) and Muriuki (2004) illustrate a shunt method technique that can tune the stiffness of sensors, actuators and energy harvesters. This thesis focuses on the two common designs (d31 or d33 structure) associated with the piezoelectric device applications. MEMS interdigitated electrode beams are frequency tested via µLDV and showed to be tunable. Additionally, optimal interdigitated electrode layouts are investigated and reported. A design methodology is provided to help one conclude what type of piezoelectric device should be developed.

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Details

Item Type:	University of Pittsburgh ETD
Status:	Unpublished
Creators/Authors:	Creators Email Pitt Username ORCID Knight, Ryan Robert ryan.rknight@gmail.com
ETD Committee:	Title Member Email Address Pitt Username ORCID Committee Chair Clark, William W wclark@engr.pitt.edu WCLARK Committee Member Cole, Daniel G dgcole@pitt.edu DGCOLE Committee Member Vipperman, Jeffrey S jsv@pitt.edu JSV Committee Member Weiland, Lisa Mauck lweiland@engr.pitt.edu LMW36
Date:	25 September 2007
Date Type:	Completion
Defense Date:	20 June 2007
Approval Date:	25 September 2007
Submission Date:	2 July 2007
Access Restriction:	No restriction; Release the ETD for access worldwide immediately.
Institution:	University of Pittsburgh
Schools and Programs:	Swanson School of Engineering > Mechanical Engineering
Degree:	MSME - Master of Science in Mechanical Engineering
Thesis Type:	Master's Thesis
Refereed:	Yes
Uncontrolled Keywords:	energy harvesting; interdigitated electrode; MEMS; piezoelectric; PZT; resonator
Other ID:	http://etd.library.pitt.edu/ETD/available/etd-07022007-160530/, etd-07022007-160530
Date Deposited:	10 Nov 2011 19:49
Last Modified:	19 Dec 2016 14:36
URI:	http://d-scholarship.pitt.edu/id/eprint/8255

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